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Corning Ule 7973 Low Expansion Glass

Product Item : RT20220501001#
Category： Materials
Type: Corning Optical Substrate
Substrate: Corning Ule-7973
Stress Optical Coefficient: 4.15 (Nm/Cm)/(Kg/Cm2)
Abbe Constant: 58.1
Product description：Corning Ule 7973 Low Expansion Glass/Corning Ule Glass/Corning 7973 Glass/Corning Ule/Corning Quartz
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General Introduction: Corning 7973 is a titania-silicate low expansion glass that has been tailored to meet the needs for mask and optical substrates for EUVL applications. 7973 has a similar composition to ULE 7972 glass and is made using the same flame deposition process. The lithography transition from 193nm to 13.4nm required a major design shift in stepper optics from refractive to reflective. In reflective optics, substrate materials should be purely passive. The incident light should reflect off of the multilayer coatings of the optics and the photomask without the introduction of any mechanical or optical distortion caused by the underlying substrate. To minimize distortion from the minute temperature changes and meet the stringent EUVL specifications, the substrates must have a near-zero coefficient of thermal expansion (CTE) and tightly controlled zero cross over range. The extremely low CTE requirements are specified in parts per billion per degree Celsius (ppb/C)..

Products Name: Corning ULE 7973 Low Expansion Glass
Alias: Corning 7973, Corning 7973 glass, Corning 7973 low expansion glass, 7973 glass, ULE 7973, ULE 7973 glass, 7973 low expansion glass ,etc

Optical and Thermal Properties:

Stress Optical Coefficient	4.15 (nm/cm)/(kg/cm2)
Striae Normal to Blank Faces	None
Abbé Constant	53.1
D.C. Volume Resistivity, 200 ˚C 100 Hz (R)	1011.6 ohm•cm
Thermal Conductivity (K)	1.31 W/(m•K)
Unless otherwise stated, all values above @ 25 °C

Thermal Diffusivity (D)	0.0079 cm2/s
Mean Specific Heat (Cp)	767 J/(kg•˚C)
Strain Point	890 ˚C
Annealing Point	1000 ˚C
Softening Point (estimated)	1490 ˚C
Unless otherwise stated, all values above @ 25 °C

Mechanical Properties:
1).Unless otherwise stated, all values @ 25 °C Elastic Modulus (E) 67.6 GPa
2).Shear Modulus 29.0 GPa
3).Bulk Modulus 34.1 GPa
4).Poisson's Ratio 0.17
5).Density 2.21 g/cm3
6).Knoop Hardness (200g load) 460 kg/mm2 Ultimate Tensile Strength 49.8 MPa
7).Specific Stiffness (E/ρ) 3.12 x 106 m

Chemical Durability:
1).Excellent resistance to weathering.
2).Exhibits virtually no surface clouding or electrical surface leakage when subject to attack by water, sulfur dioxide, and atmosphere gases.
3).High Resistance to attack by nearly all chemical agents.

Main Applying Fields:

Applying Fields:	LCD TV, computer monitor Glass substrate of notebook computer Ceramic carriers and filters for mobile emission control systems Optical fiber, optical cable, hardware and equipment for communication network Optical biosensors for drug development Optics in semiconductors, aerospace, defense, astronomy and Metrology
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Matching Custom Manufacturing Serivce:
Including Moulding, CNC machining, Polishing, Particle beam processing, Magnetic flux conversion processing, Grinding, Coating, Lightweighting, Custom Shaping, Counterbores, Drilling & Coring, Edge & Bevel Polishing,3D Contouring, Bevels & Chamfers, Steps & Slots, Laser Cutting & Marking, Metrology & Inspection, Precision Pitch Polishing, Double-Sided Polishing, Optical Assembly, Measuring, etc.

Main Cooperation Materials Manufacturers:
CORNING, OHARA, SCHOTT, LEONI, AGC,HELLMA, NIKON,VITRON,C-LASER,ETC

Main Export Countries & Areas:
Usa, Uk, Japan, Germany, Spain, France, Swiss, Korea, Russia, Pakistan, India, Portugal, Canada, New Zealand, Australia, Saudi Arab, Turkey, Finland, Poland ,etc.

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